durusmail: mems-talk: evaporation deposition
evaporation deposition
2006-09-25
evaporation deposition
J.J wang
2006-09-25
1) Clean your glass wafer thouroughly.
2) Try a little bit thicker chrome
3) DON'T use ultrasonic

Good luck.

Rupesh Sawant  wrote: hi,
i tried to deposit Au on glass slide using eavpporation deposition method.
i deposited a 5 nm chromiun layer before depositing Au and then deposited
180nm Au layer. photoresist was used as a sacrifial layer. the Au layer
(along with the desired features) came out instantly when i dipped the slide
in acetone but the photoresist was still there on the slide.

could someone tell me a reson for this?
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