durusmail: mems-talk: evaporation deposition
evaporation deposition
2006-09-25
evaporation deposition
bdaly@evapcoat.com
2006-09-27
Rupesh,

You may want to try 20-30nm of chromium and then 50 to 100nm Nickel before
applying the gold.

Brian Daly
Engineer
Evaporated Coatings, Inc.
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>
> Rupesh Sawant  wrote: hi,
> i tried to deposit Au on glass slide using eavpporation deposition method.
> i deposited a 5 nm chromiun layer before depositing Au and then deposited
> 180nm Au layer. photoresist was used as a sacrifial layer. the Au layer
> (along with the desired features) came out instantly when i dipped the slide
> in acetone but the photoresist was still there on the slide.
>
> could someone tell me a reson for this?
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