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Wet etching SiN with photoresist
Wet etching SiN with photoresist
2006-10-28
蘇俊榮 Chun-Jung Su
2006-10-31
Scott McWilliams
2006-10-31
R Zhang, Electrical & Electronic Engineering
2006-10-31
Avi Laker
Wet etching SiN with photoresist
Avi Laker
2006-10-31
CF4 plasma etching may be used, it helps if you have an Sio2 stop mask under your nitride.
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