durusmail: mems-talk: Drie support wafer
Drie support wafer
2007-06-14
2007-06-15
2007-06-15
2007-06-18
2007-06-15
(211) silicon wafers
Drie support wafer
Xiaoguang Liu
2007-06-15
Hi Jim

What support wafer would you use? Is it silicon also? How would you prevent
the support wafer from being etched? Thanks a lot.

Best
Leo

On 6/14/07, Jim Beall  wrote:
>
> We use a thin layer of Crystalbond 509C wax to bond Si wafers to
> backing wafers. You have to watch out for bubbles in the wax or you
> can have die pop up.
>
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