I have hard time in depositing platinum. I tried three different size e-beam evaporator but all deposition result in my PMMA resist damage. If resist continues damage, I should go with negative resist for EBL and need to etch out the other area but I'm afraid whether I could get good resolution (~10nm) with etching. How did you resolve the heat problem? I tried to reduce the evaporation rate but it seems not very helpful. Thank you, Sokwon Paik Postdoctoral research associate Oak Ridge National Laboratory