Another potential complication that we've run into is resist outgassing. You might want to vacuum bake your substrate before doing the deposition. -Mike Martin U. of Louisville >>> sokwon Paik7/5/2007 10:11 AM >>> Jesse, Thank you for your mentoring. It was very helpful and made one questions. What kind of evaporator you use? I tried even lower deposition rate than you and it seems I need to use the same machine as you for the platinum coating. Thank you, Sokwon