I am assuming that you are referring to wet or dry furnace oxidation. The SiO2 will be an insulator and a very good one in either case. "Thermal ox" has the highest structural integrity of all the ways of making an oxide and will be very insulating. In terms of leakage they are largely the same. The choice of wet or dry furnace oxidation is dependent on the thickness you want to grow. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Wenlin Jin Sent: Tuesday, January 08, 2008 4:10 PM To: General MEMS discussion Subject: [mems-talk] conductivity of SiO2 layer grown on top of heavilydoped silicon Hi, All, I'm considering grow a silicon oxide layer through wet or dry oxidation process. The question is: will the oxide layer obtained in such a way be conductive? Advices are appreciated.