Hi, All, I didn't put the condition right in the previous email. The starting wafer is heavily doped. Here is the question again: I'm considering grow a silicon oxide layer on a heavily doped silicon wafer through wet or dry oxidation process. The question is: will the oxide layer obtained in such a way be conductive? Advices are appreciated. Best regards Wenlin Jin -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Wenlin Jin Sent: Tuesday, January 08, 2008 5:10 PM To: General MEMS discussion Subject: [mems-talk] conductivity of SiO2 layer grown on top of heavilydoped silicon Hi, All, I'm considering grow a silicon oxide layer on a heavily doped silicon wafer through wet or dry oxidation process. The question is: will the oxide layer obtained in such a way be conductive? Advices are appreciated. Best regards Wenlin Jin