Dopants will have neglible impact on the SiO2. The dopants will be oxidized into unconductive oxides. Even with a heavily doped wafer the atomic % of dopants is low. It will be very insulating. The differences in different types of silicon oxides made in different types of situations is measured by break down voltages and not conductivity. They are all insulators. The differences is how much electrical strain they can bear before they break down. If you are really asking about break down voltages, that is a whole different topic than conductivity. Even so, your wafer should have oxide with great electrical characteristics, in terms of having high break down. For interfaces of the silicon dioxide, you should have a little O2 in the gas flow while the wafers are pushed in and ramped so they get 30 to 100 angstroms oxide before you start the wet oxidation at a higher temperature. For dry oxidation during Drive processes have a little O2 at the push in and temperature ramp also. Don't ever start an oxidation on bare silicon at a high temperature. The cross-sections will look wretched. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Wenlin Jin Sent: Wednesday, January 09, 2008 8:06 AM To: General MEMS discussion Subject: RE: [mems-talk] conductivity of SiO2 layer grown on top of heavilydoped silicon Hi, All, I didn't put the condition right in the previous email. The starting wafer is heavily doped. Here is the question again: I'm considering grow a silicon oxide layer on a heavily doped silicon wafer through wet or dry oxidation process. The question is: will the oxide layer obtained in such a way be conductive? Advices are appreciated.