durusmail: mems-talk: High Thickness of Aluminum on Silicon
High Thickness of Aluminum on Silicon
2008-01-21
2008-01-22
2008-01-22
Selective, clean PDMS etch
2008-01-23
2008-01-22
2008-01-21
High Thickness of Aluminum on Silicon
Jacques FATTACCIOLI
2008-01-21
Hi All !

For my process, I would like to know if there is an "easy" way to get
a thick (300microns > t > 30 microns) layer of bare aluminum on a
silicon wafer ?
Evaporation and Sputtering are not suitable for this...

Thank you very much for you help

Jacques FATTACCIOLI
IIS - University of Tokyo
jacques@iis.u-tokyo.ac.jp
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