What is your device concern? Modern plasma cleaners have electron free plasma that can safely and gently etch organics with no ESD and minimal change if temperature. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 www.yieldengineering.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Chin-Jen Chiang Sent: Wednesday, January 23, 2008 5:44 PM To: mems-talk@memsnet.org Subject: [mems-talk] how to get rid of photoresist residure Hi, I am trying to use PRS-3000 and NMP at ~80C to get rid of photoresist residure but either way dose not work. Given the concern of my device structure, I can not use Pirahna or RIE O2 descuum. Can anyone suggest any other approach?