If There are not Al or Ti alloys on the sample, you can use pure developer (AZ400 K or AZ 324). Approximate 10 secs you will obtain clean surface. But be carefull not to damage alloy cantacts.. See you... Tolga YELBOGA Project Engineer Nanotechnology Researh Center Bilkent University Bilkent, Ankara 06800 TURKEY Voice: 90-312-290-1020 www.nanotr.bilkent.edu.tr -----Original Message----- From: Chin-Jen Chiang [mailto:chinjen_chiang@yahoo.com.tw] Sent: Friday, January 25, 2008 12:42 AM To: General MEMS discussion Subject: RE: [mems-talk] how to get rid of photoresist residure Hi Bill, Thanks for your response. My device has very sharp Si field emitter tips with ~150A radius. Using RIE descum with O2 gas might damage the Si tips due to ion or radical bombardment. Do you have any comment about this? Thanks. Lawrence