Hi Ian,

Your temperature and voltage conditions should work so it sounds like =
there is something wrong with your system. You may want to contact the =
AML Bondcentre for getting your wafers bonded.

Regards

Tony



Tony Rogers

Applied Microengineering Ltd

Unit 8, Library Avenue

Harwell Campus

Didcot

OX11 0SG

UK

Tel.: +44 (0)1235 434341 (DL)

Tel.: +44 (0)1235 833934 (SB)

Fax: +44 (0)1235 833935

e-mail: tony@aml.co.uk

Web:http://www.aml.co.uk
-----Original Message-----
From: mems-talk-bounces@memsnet.org on behalf of ShengYi Hsiao
Sent: Thu 06/03/2008 08:29
To: mems-talk@memsnet.org
Subject: [mems-talk] fialed in borofloat-si bonding?[Scanned]
=20
Hi everybody.

Does anyone have experience in bonding borofloat glass to silicon wafer?

I am using recipe of 1000V and 400degree celcuse in vaccume environment,

however, after applying  that bonding condition for an hour, the glass =
and=20
the

wafer still not being bonded. Only same weak connection randomly =
happened,

which results the  interfering pattern. The wafers can easily be =
separated.

Does anyone know the bonding condition for borofloat glass and Si?



the FAIL experiment records are :

voltage : 1000V

temperature:  400C

pressure:  9mtorr

bonding: 1 hr

bonding current: 0.02mA (form starting to the end) ....WHY?

Charge: 0~6e-2 (form starting to the end)


Any help would be greatly appreciated.

Greetings,

IAN Hsiao.
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