As others have commented, the reason for no bonding is no current. This can be due to three possible causes: 1 - Too much resistance in the stack - thick oxide is the most likely reason. 2 - Open circuit - make sure that your potential source is actually in direct contact with your stack. 3 - proper polarity - make sure that you are net negative potiential to the glass - easiest way is to have the silicon attached to a ground, and apply a negative potential to the glass. What kind of bonding system (if any) are you using? This may be something as simple as an electrode out of position. Best Regards, Chad Brubaker EV Group invent * innovate * implement Senior Process Engineer - Technology - Tel: 480.727.9635, Fax: 480.727.9700 e-mail: c.brubaker@EVGroup.com, www.EVGroup.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of ShengYi Hsiao Sent: Thursday, March 06, 2008 1:30 AM To: mems-talk@memsnet.org Subject: [mems-talk] fialed in borofloat-si bonding? Hi everybody. Does anyone have experience in bonding borofloat glass to silicon wafer? I am using recipe of 1000V and 400degree celcuse in vaccume environment, however, after applying that bonding condition for an hour, the glass and the wafer still not being bonded. Only same weak connection randomly happened, which results the interfering pattern. The wafers can easily be separated. Does anyone know the bonding condition for borofloat glass and Si? the FAIL experiment records are : voltage : 1000V temperature: 400C pressure: 9mtorr bonding: 1 hr bonding current: 0.02mA (form starting to the end) ....WHY? Charge: 0~6e-2 (form starting to the end) Any help would be greatly appreciated.