Lift off is easy. Samples down to 0.1 micron and up to 40 microns thick = resist for 30 micron plate up copper. I am in Shanghai for Semicon. = When I get back I will try to locate you to discuss at length. Bill = Moffat ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Ferda Mravenec Sent: Tue 3/18/2008 4:34 AM To: mems-talk@memsnet.org Subject: [mems-talk] Ti etching? Hello all, I am solving a problem with masking of the boro-silicate and soda-lime = glass samples. I need a Ti mask on the glass with straight lines without = Ti layer. The straight lines are from 1 to 3 um (widths of the mask = opening ). One chance is make Lift off procedure but I think it could be = done by simpler way. I would like to make 100-200 nm Ti layer on the glass surface (i.e. = BK7...), than I coat a photoresist (i.e. SU8), develop and do = anisotropic etching of the titanium layer. I have found some solutions = like H2O2, HF, KOH which are suitable for Ti layer etching but HF is = dangerous and also I afraid about undercutting and glass surface damage. Does anyone know some suitable recipe for this work?