Try 3 H2SO4: 1 H2O2: 1 H2O at 80 oC. --- Ferda Mravenecwrites: > Hello all, > > I am solving a problem with masking of the > boro-silicate and soda-lime glass samples. I need a > Ti mask on the glass with straight lines without Ti > layer. The straight lines are from 1 to 3 um (widths > of the mask opening ). One chance is make Lift off > procedure but I think it could be done by simpler > way. > > I would like to make 100-200 nm Ti layer on the > glass surface (i.e. BK7...), than I coat a > photoresist (i.e. SU8), develop and do anisotropic > etching of the titanium layer. I have found some > solutions like H2O2, HF, KOH which are suitable for > Ti layer etching but HF is dangerous and also I > afraid about undercutting and glass surface damage. > Does anyone know some suitable recipe for this work? > > Thanks a lot for any suggestion. > > Ferda Mravenec