Refer Journal of The Electrochemical Society Vol. 147 Number 7, July 1998 "Aqueous KOH Etching of Silicon (110)" by 'Byoungwook Kim and Dong-il Dan Cho', pp. 2499. -------------------------------------------- Arum Han Center for Microelectronic Sensors and MEMS University of Cincinnati E-mail : hana@email.uc.edu Address : 688 Riddle Rd. #400c Cincinnati Ohio 45220 USA Phone : (513)-556-4795 (Office) (513)-872-0710 (Home) ------------------------------ ------------ On Wed, 19 Aug 1998 mhnam@palgong.kyungpook.ac.kr wrote: > Dear MEMS > I have worked (110) silicon wafer KOH etching verticaly for > acceleration sensor. > But vertical KOH etching was not conformed. I want to know the > method for vertical KOH etching. > I wish your advices and good informastions. > Thanks for reading my e-mail. > email adress; mhnam@palgong.kyungpook.ac.kr > >