Refer Journal of The Electrochemical Society Vol. 147
Number 7, July 1998 "Aqueous KOH Etching of Silicon (110)"
by 'Byoungwook Kim and Dong-il Dan Cho', pp. 2499.

--------------------------------------------
Arum Han
Center for Microelectronic Sensors and MEMS
University of Cincinnati
E-mail  : hana@email.uc.edu
Address : 688 Riddle Rd. #400c
          Cincinnati Ohio 45220
          USA
Phone   : (513)-556-4795 (Office)
          (513)-872-0710 (Home)
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On Wed, 19 Aug 1998 mhnam@palgong.kyungpook.ac.kr wrote:

>  Dear MEMS
>  I have worked (110) silicon wafer KOH etching  verticaly for
> acceleration sensor.
>   But vertical KOH etching was not conformed. I want to know the
> method for  vertical KOH etching.
>   I wish your advices and good informastions.
>  Thanks for reading my e-mail.
> email adress; mhnam@palgong.kyungpook.ac.kr
>
>