durusmail: mems-talk: Hf resistant Adhesion layer for Au on Si
Hf resistant Adhesion layer for Au on Si
Hf resistant Adhesion layer for Au on Si
Jesse D Fowler
2008-04-09
Ti is vulnerable to HF. So, you may get some (or all) peeling if you use Ti.

Jesse Fowler


"Shay Kaplan"  writes:

Try to use Ti as adhesion layer.

Shay
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