correct, Piranha cleaning is a requirement, just make sure a proper rinse with DIW follows. On Mon, Apr 14, 2008 at 9:12 PM, Prem Palwrote: > Dear all > > I wish to perform the wafer bonding process between LPCVD deposited > nitride/oxide layers. Will it require cleaning prior to bonding using RCA or > Piranha solution? If yes, the cleaning in Piranha solution (H2SO4+H2O2) is > adequate for successful wafer bonding processAll kinds of suggestions will > be highly appreciated. > -- _fm