I heard there is a program called SUPREM for process simulation. However, I don't have hands-on experiences on it. > Hi, > > I've found that the grove-deal model of oxidation doesn't work well > for growing oxide on bare silicon waters. What model should I use to > try to find the time to grow say a 200 angstrom layer of oxide (dry > and/or wet)? -- Peng Li Research Assistant Department of Mechanical Engineering & Applied Mechanics University of Rhode Island 133D Kirk, 92 Upper College Road, Kingston, RI 02881 Phone: (401) 874-2247