The work published over time by Grove and his colleagues had a 'fitting' factor, which appeared in the model as an initial oxide thickness, which they could never explain. Subsequently, literally a thousand papers were published on oxidation of silicon. As a way to sift through this massive pile, I suggest you look for the articles by Hisham Massoud, who is a professor of EE at Duke, who at one point had done what was acknowledged to have been the best work on oxidation of very thin oxide layers. Sincerely, Albert K. Henning, PhD Director of MEMS Technology NanoInk, Inc. 215 E. Hacienda Avenue Campbell, CA 95008 408-379-9069 ext 101 ahenning@nanoink.net -----Original Message----- From: Jose Guevarra [mailto:jose.dr.g@gmail.com] Sent: Friday, April 18, 2008 10:33 PM To: General MEMS discussion Subject: [mems-talk] SiO2 growth on bare silicon Hi, I've found that the grove-deal model of oxidation doesn't work well for growing oxide on bare silicon waters. What model should I use to try to find the time to grow say a 200 angstrom layer of oxide (dry and/or wet)?