Hi Jose and Ravi, I have used the following oxide calculator in the past with quite good results: http://www.lelandstanfordjunior.com/thermaloxide.html At the lower left corner of the page you can see some options are provided. Massoud's model is a commonly used model for thin oxide calculations (although there may be others that I am not aware of). Regards, --Kris --- Ravi Shankarwrote: > Hi Jose Guevarra, > > i think your problem is not because of bare > silicon. its because of > thickness of oxide you want to grow. grove-deal > model doesn't work > well for very thin oxides. likey you, i am also > interested to know is > there any model available in literature to grow thin > oxides (Say, 200 > angstroms) with good controllability. K. Vossough, Ph.D. Nano and Micro Technology Consultants E-mail: vossough@memswork.net Voice: (408)373-5413 Fax: (650)798-5001 http://www.memswork.net