I've published work on fracture strength of 50 um +/- silicon membranes, about 4 mm or so in area. See references 43, 47, and 51 at: http://www.aquarianmicro.com/papers.html I have found student ANSYS and ANSYS to be useful tools in predicting accurately the stress in single crystal silicon membranes, with complicated edge structures (fillets) as well as bosses. The standard membrane analytical equations in the texts by Timoshenko and di Giovanni also do well, provided one uses an adjustment of the membrane deflection parameters (in the linear and cubic terms). You should also look at references by Chris Muhlstein at Penn State; the JMEMS paper by Wilson and Beck; work by Stuart Brown; and references therein. Alissa Fitzgerald's PhD thesis from Stanford is also a very good work to read and understand. It is available through University Microfilms in Ann Arbor, Michigan. There are outstanding controversies regarding the mechanism of the nucleation of fracture in single crystal and poly-silicon, as well as the effect of early-onset fracture on the mechanical resonance frequency of cantilevers. Sincerely, Albert K. Henning, PhD Director of MEMS Technology NanoInk, Inc. 215 E. Hacienda Avenue Campbell, CA 95008 408-379-9069 ext 101 ahenning@nanoink.net -----Original Message----- From: Andrea Mazzolari [mailto:mazzolari@fe.infn.it] Sent: Saturday, April 19, 2008 2:20 PM To: mems-talk@memsnet.org Subject: [mems-talk] Silicon fracture strength Hi all, i need to bend very thin (50um or less) silicon crystals. I'm looking for information about silicon fracture strength in order to be able to predict the maxium bending radius which can be achieved. Any suggestion to some literature treating this topic ? I've tried to search for it, but i've been not very lucky.