Sreemanth, like everyone has been saying get clean good vacuum. A dc magnetron is all that is needed. Gary -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of Sreemanth M Uppuluri Sent: Tuesday, May 20, 2008 12:41 PM To: General MEMS discussion Subject: [mems-talk] Aluminum sputtering and evaporation Hello All, This is sort of a generalization of one of the previous questions - I am trying to coat Aluminum films of thickness around 150nm on quartz substrates.. I have tried using RF-sputtering and also e-beam evaporation. In both cases the film quality was not very good. There were these hillocks forming all over the film. Could anyone please recommend any recipe for obtaining hillock free Aluminum films. Thanks, Sreemanth