Hi, Thank you for your reply! I am sorry. Hard bake temperature is only 200 C. I used the standart recipe of the SU8-2000. If I reduce the spin rate, will the SU8-2000 file be uniform? Best, ----- Original Message ---- From: Tolga YELBOGATo: General MEMS discussion Sent: Sunday, August 24, 2008 5:23:53 PM Subject: Re: [mems-talk] Polyimide Hi; Your hard bake temperature is very high. You should bake less than 2000C in long time. Did you use the standart recipe of the SU8-2000