durusmail: mems-talk: problem in BHF etching
problem in BHF etching
2008-09-16
2008-09-16
2008-09-17
2008-09-17
2008-09-18
problem in BHF etching
王××
2008-09-17
I agree with that.

It's almost impossible to make a vertical wall using BHF on glass.
But if the structure is not that deep,
You can still deposit and pattern some thick metal layer as mask.
Many metal can resist BHF.

Best Regards

Yizhong Wang

Department of Mechanical Engineering
University of Pittsburgh
reply