Re: [mems-talk] Anodic bonding

Hi,

  Similar questions have been asked alot.

Serach for 'anodic bonding soi' in this maillist.

                           Matthew King

==========================
"Kuijpers, P e m"  wrote:
  Hi,

Can we perform anodic bonding on Pyrex and SOI wafers?
Thickness of the oxide layer is app.0.5 µm.
Maybe some recipe guidelines also.

Thanks.

Peter Kuijpers

mailto:p.e.m.kuijpers@philips.com
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