Hi, This might be an odd request, but I am curious if anyone knows of some Karl Suss MJB3 mask aligners that might be available for parts. We have 3 of them in our lab, and are starting to run out of spares for repairs. Thanks very much, Marty Harris 2300 Micro and Nanotechnology Laboratory 203 N Wright Street, Urbana IL 61801 mdharris@illinois.edu 217.244.5293