durusmail: mems-talk: Is there any software for etching/development simulation?
Is there any software for etching/development simulation?
2008-10-22
2008-10-22
2008-10-22
2008-10-22
2008-10-22
2008-10-23
2008-10-23
2008-10-23
2008-10-23
2008-10-24
Is there any software for etching/development simulation?
Denis Petrov
2008-10-22
Hi Jarod,

as far as I understand, IntelliSense has a module that simulates
different etching processes (Bosch Process for instance).

Regards,

Denis

2008/10/22 jarod vincent :
> Dear all,
>
> Is there any software for etching/development simulation? I found there is
> no such package in Ansys. Is there any commercial software?
> Thank you for suggestion.
>
> Best Regards
> Jarod Vincent
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