Here is a link to software from Conventor... Their software can
empirically model litho, etch and deposition processes.  Its expensive
though.

http://www.coventor.com/mems/designer/index.html

George Patrick Watson (Pat)
PRISM Fabrication Laboratory
E-Quad J301A
Princeton University
Princeton, NJ 08544
gwatson@princeton.edu
(609) 258 4626

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Mike Stan
Sent: Thursday, October 23, 2008 9:43 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Is there any software for
etching/developmentsimulation?

Prolith was originally developed by Chris Mack while working for the NSA
in the 1980's.  It has gone through numerous revisions and ownership
transfers.  It is now marketed by KLA-Tencor Corp.  Information is
available in their Product Portfolio on their website listed under
Computational Lithography.  I don't know if it has any use for etch
modeling but it certainly is useful for develop modeling.

Mike Stan