Brad,
     Good to see your name, Jarrod, KLA bought the company Chris Mack owned.
They may help.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Brad Cantos
Sent: Wednesday, October 22, 2008 4:51 PM
To: jarod vincent; General MEMS discussion
Subject: Re: [mems-talk] Is there any software for
etching/developmentsimulation?

Jarod,

Many years ago, there was a program called "PROLITH" that modeled exposure and
development simulations for positive novalac photoresists.  Below is a reference
to a paper that introduced it.  A few years after it was introduced they tried
to market it commercially, and I don't know the current status.  You may be able
to trace down the author, Chris Mack.

Mack C. A. : ³PROLITH : a comprehensive optical lithography model² , SPIE, 538,
pp. 207-219 (1985).

Brad Cantos