durusmail: mems-talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
2008-11-17
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2008-11-23
anisotropic Ni etching
2008-11-23
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2008-11-28
2008-11-24
Ti and Ni wet etching in HF
saravan kallempudi
2008-11-27
Hi,

 You can use 6 % Nitric acid for Ni and etch rate will be 75-100 nm/min
depending on quality of deposition.
---
Saravan

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