durusmail: mems-talk: Ti and Ni wet etching in HF
Ti and Ni wet etching in HF
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anisotropic Ni etching
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2008-11-28
2008-11-28
2008-11-24
Ti and Ni wet etching in HF
汪飞
2008-11-28
I have not tried with any specific Nickle etchant. I used Au etchant (KI)
once to etch out the electroplated nickel and it worked pretty well. As the
Ti, H2O2 could be a good choice. Both of the two solution are safe for
silicon substrate.
Sorry for typing mistake.:)

Best regards,
Fei


2008/11/28 汪飞 

> I have not tried with any specific Nickle etchant. I used Au etchant (KI)
> once to etch out the electroplated nickel and it worked pretty well. As the
> Ti, H2P2 could be a good choice. Both of the two solution are safe for
> silicon substrate.
>

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Best regards,
Yours sincerely
Fei Wang
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