durusmail: mems-talk: Aluminum Bond pad reference
Aluminum Bond pad reference
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Aluminum Bond pad reference
Wilson, Thomas
2009-01-27
Jordi,

Any comment about the adhesion of gold to bare aluminum? I've read somewhere
it's pretty awful.

Thomas

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Jordi Teva
Sent: Tuesday, January 27, 2009 12:20 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Aluminum Bond pad reference

the Al bond pads provided by the semiconductor industry are not pure Al,
they are alloys with others metals, mostly Cu, just to avoid the
problem you have..
I do agree with Morten¨'s proposal with the Gold layer..,  I think you
will have a layer of alumina as
soon as you place your chips in the ambient air...

Jordi

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