durusmail: mems-talk: Cr/Au as a mask for KOH etch
Cr/Au as a mask for KOH etch
2009-02-18
2009-02-19
2009-02-21
Cr/Au as a mask for KOH etch
jian zi
2009-02-19
hi,

It can be the mask. I use 500 A Cr and 2500 A Au. 30% KOH 60 degree C. At least
17 hour, no observable attack to the metal system.

Zhijian ZHOU
HKUST

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