Hi, I have used a bonded silicon wafer as an etching mask to make rectangle openings through Pyrex glass. You can look for details in this article: “A silicon cantilever probe card with tip-to-pad electric feed-through and automatic isolation of the metal coating,” Journal of Micromechanics and Microengineering, Volume 16, Issue 7, pp. 1215-1220, 2006. Best regards, Fei 2009/3/5, Moshe: > Thank you for all the answers > I prefer to focus on a way to made holes with wet etch. > I there a resist so the HF do not strip it ? > As I said I tried gold and polysilicon and the HF strip it. Best regards, Yours sincerely Fei Wang ______________ Postdoctoral researcher, Dr MIC - Department of Micro and Nanotechnology Technical University of Denmark (DTU) Building 344, 1st floor, Room no. 130 DK-2800, Kgs. Lyngby Denmark Tel: +45 4525 6311 Fax: +45 4588 7762 Email: fei.wang@nanotech.dtu.dk http://www.nanotech.dtu.dk