Javier,

What kind of surface preparation are you doing before the deposition?

I would expect that making sure your Si surface is as clean and oxide
free as possible would improve your ability to get a good ohmic contact.

Dan

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Javier Crespo
Sent: Thursday, March 26, 2009 2:05 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Ti-Si Ohmic contact...

Hello,

Does anyone know how could I improve the ohmic contact of the sputtered
Ti layer with silicon? I know that there are some differences if the
Silicon is N or P-type, but in both cases I can't have a good contact.

Should I use TiW in case of Ti?