Dear Pros, Recently I've been working on a simulation of micro hot plate. The 3D model was built in Solidworks and then imported into the Ansys. I glued all the volumes, and smart meshed them using SOLID69. However, when I list the elements and nodes number, I found the total number of elements is approximately 5 times more than that of the nodes. Is the result supposed to be like that? And here is another question: the micro hot plate (a.k.a heating membrane), is so badly proportioned-like with the width 50um but the thickness 0.2um and with the substrate 500um thick, when I tried to model and mesh it in the real size, the Ansys seems to get stucked and tells me not enough memory. How should I reduce the complexity of the model without introducing great errors? Could I increase the thickness of the heating membrane (so that the mesh could be done) and change the properties of the materials ? Thank you very much! A rookie in the MEMS field