You are probably meshing with tetrahedral elements, which is why you have many more elements and nodes and you are running out of memory. Tets are very inefficient for modeling thin structures. I recommend modifying (slicing, merging, etc.) the underlying solid model so that the structure can be swept mesh with hexs and pyramids. A swept mesh will be much more efficient. Also, I recommending using the current coupled-field solid element (SOLID226) rather than the older SOLID69 element. Dan Shaw ANSYS, Inc -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of sniper Sent: Monday, July 13, 2009 10:15 PM To: mems-talk Subject: [mems-talk] About Ansys elements, nodes and MEMS meshing Dear Pros, Recently I've been working on a simulation of micro hot plate. The 3D model was built in Solidworks and then imported into the Ansys. I glued all the volumes, and smart meshed them using SOLID69. However, when I list the elements and nodes number, I found the total number of elements is approximately 5 times more than that of the nodes. Is the result supposed to be like that? And here is another question: the micro hot plate (a.k.a heating membrane), is so badly proportioned-like with the width 50um but the thickness 0.2um and with the substrate 500um thick, when I tried to model and mesh it in the real size, the Ansys seems to get stucked and tells me not enough memory. How should I reduce the complexity of the model without introducing great errors? Could I increase the thickness of the heating membrane (so that the mesh could be done) and change the properties of the materials ? Thank you very much! A rookie in the MEMS field