durusmail: mems-talk: How to clean silicon wafer after a bad lift-off
How to clean silicon wafer after a bad lift-off
2009-07-21
2009-07-22
2009-08-07
2009-07-22
How to clean silicon wafer after a bad lift-off
Shah, Forum N
2009-07-21
Hello All,

Can anyone tell me how to clean the Silicon wafers after doing lift-off process
(bad lift-off)? So that I can re-use the wafer. I know we use HF for cleaning
the wafers but I am not sure of the exact protocol. Any suggestions would be
appreciated.

Thanks
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