You could try piranha then HF Dr Michael Cooke Electronic Device Process Scientist PETEC (The Plastic Electronics Technology Centre) part of the CPI Group (Centre for Process Innovation) NETPark, Thomas Wright Way, Sedgefield, County Durham TS21 3FG T: +44 (0) 1740 625 717 (office)/+44 (0)1642 442 480 (lab) F: +44 (0)1642 447 298 www.ukpetec.com www.uk-cpi.com -----Original Message----- From: Shah, Forum N [mailto:forum@exchange.uta.edu] Sent: 21 July 2009 22:11 To: mems-talk@memsnet.org Subject: [mems-talk] How to clean silicon wafer after a bad lift-off Hello All, Can anyone tell me how to clean the Silicon wafers after doing lift-off process (bad lift-off)? So that I can re-use the wafer. I know we use HF for cleaning the wafers but I am not sure of the exact protocol. Any suggestions would be appreciated. Thanks Forum