durusmail: mems-talk: HDMS treatment of SU8 mold used for PDMS thin film fabrication
HDMS treatment of SU8 mold used for PDMS thin film fabrication
2009-08-11
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HDMS treatment of SU8 mold used for PDMS thin film fabrication
Shao Guocheng
2009-08-11
Hi, Guys,

    I'm trying to make some PDMS thin film about 40um thick. Without using any
anti-sticking agent, I'm able to get the film with small size, but have hard
time obtain bigger piece. So I'm thinking about doing silanization treatment for
my SU8 mold. We have HDMS available in our lab. Can any one share some
experience about SU8 mold silanization. what kinda protocol should I take, any
special precautions because from what I know, HDMS is toxic, although maybe not
as bad as some other silane like TMCS.   thx

Shao



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