hi, Huihang,

What's the thickness of Ti/Pt you tried? Thanks.

On Fri, Aug 21, 2009 at 7:18 AM, Huihang Dong wrote:
> Hi,
>
> I patterned Ti-Pt on cured polyimide layer by lift-off (don't know what is
your substrate).
> The PR 1827(around 2.7 um) was patterned by Image reversal which can give you
negative angle on the edge of trench to make lift-off easier. The Lift-off took
me about 10-20 min.
>
> Hope this can help.
>
> Thanks,
> Huihang