durusmail: mems-talk: Bilayer photoresist process
Bilayer photoresist process
2009-10-02
2009-10-02
2009-10-02
2009-10-03
2009-10-04
2009-10-05
2009-10-05
Bilayer photoresist process
Andrea Lucibello
2009-10-01
Hi all,

Does anyone know if it is possible to planarize photoresist (change its shape
from square to round)? I know that exist a method called Bilayer photoresist
process?  How does this process work?

Thanks in advance for the help.

Regards
A.L
reply