durusmail: mems-talk: Looking for a way to do deep etch in glass (25uM)
Looking for a way to do deep etch in glass (25uM)
2009-11-03
2009-11-04
2009-11-04
2009-11-04
2009-11-04
2009-11-06
2009-11-04
2009-11-04
Looking for a way to do deep etch in glass (25uM)
Nathan McCorkle
2009-11-03
I am currently working with lexan (polycarbonate) and am experiencing
optical blurring when I use O2 plasma etch for too long, as well as
warping. I have decreased power and time to alleviate this problem,
but it takes many more runs to achieve the 20 - 30 micron etches that
I desire.

I asked an advisor about switching to glass, maybe a quartz or
borosilicate, and he said that I would need a gold hard mask to get
around having mask lift off during etch. I feel like there should be
some way to get a nice isotropic etch with a glass, using the current
lab equipment that we have.

Any ideas?

--
Nathan McCorkle
Rochester Institute of Technology
College of Science, Biotechnology/Bioinformatics
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