Nathan, You are correct that there are much simpler ways to perform isotropic etching in glass and quartz, but the problem is that companies that have addressed and solved this issue are not likely to disclose their process methods. There are companies that offer small volume custom chip fabrication at reasonable prices. Obviously this is not an option for you if you want to build chips hands on. Mac McReynolds Caliper Life Sciences -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Nathan McCorkle Sent: Tuesday, November 03, 2009 1:52 PM To: mems-talk Subject: [mems-talk] Looking for a way to do deep etch in glass (25uM) I am currently working with lexan (polycarbonate) and am experiencing optical blurring when I use O2 plasma etch for too long, as well as warping. I have decreased power and time to alleviate this problem, but it takes many more runs to achieve the 20 - 30 micron etches that I desire. I asked an advisor about switching to glass, maybe a quartz or borosilicate, and he said that I would need a gold hard mask to get around having mask lift off during etch. I feel like there should be some way to get a nice isotropic etch with a glass, using the current lab equipment that we have. Any ideas? Nathan McCorkle