Reflow method can be very helpful for creating microlenses. See "Variable
Focusing Microlens Chip for Potential Sensing Applications" from IEEE
Sensors Journal VOL. 7, NO. 1, JANUARY 2007. The array has been made. The
only problem I see is how small lens it can create. Less than 100 um
probably is a problem.

UV curable adhesive is more difficult to handle than photoresist.

I am glad to see more application from it.

Cheers,
Josh



> ---------- Forwarded message ----------
> From: "Glenn Silveira" 
> To: "General MEMS discussion" 
> Date: Mon, 9 Nov 2009 09:27:58 -0800
> Subject: Re: [mems-talk] Microlens fabrication
> Refow sounds difficult and you risk distorting the lens shape. how about
> using underfill with UV curable adhesive to set the sphere array/mold.
>
> Best regards,
> Glenn
>
> -----Original Message-----
> From: Alasdair Rankin [mailto:arankin@groupivsemi.com]
> Sent: Monday, November 09, 2009 6:08 AM
> To: 'General MEMS discussion'
> Subject: Re: [mems-talk] Microlens array
>
>
> Hi Dean,
>
> I appreciate the feedback.  That's an interesting approach that I hadn't
> thought of.  I was planning to align to a pattern underneath.  It sounds
> like what you're proposing would be a more uniform array of lenses, if I am
> understanding you.
>
> The surface already does have a topography to it, and this would probably
> be
> an ideal approach for a proof of concept.  Do you think this could be
> repeatable?  Any experience with the suggested chemical?
>
> Thanks guys for your feedback,
>
> Alasdair