durusmail: mems-talk: Turning Si surface hydrophobic
Turning Si surface hydrophobic
2009-11-17
2009-11-18
2009-11-18
2009-11-19
2009-11-19
2009-11-19
Turning Si surface hydrophobic
Miyakawa, Natsuki
2009-11-17
Dear all,

Does anyone of you know some methods to turn the surface of thermally oxidized
Si hydrophobic (say contact angle > 70°)? The hydrophobisity should be long-term
stable (> years @ room temperature), thermally stable (> 1h @ 800-900°C), and
chemically stable (esp. under alkaline conditions).


Thank you!

Natsuki
reply