durusmail: mems-talk: Turning Si surface hydrophobic
Turning Si surface hydrophobic
2009-11-17
2009-11-18
2009-11-18
2009-11-19
2009-11-19
2009-11-19
Turning Si surface hydrophobic
Yonghao Xiu
2009-11-19
Making the hydrophobic surface stable at 800-900C for 1hr may be difficult. You
may try fluoroalkyl silane treatment. But at the best the surface can withstand
~400C for 30min-1hr in air.
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